发明名称 PHOTORESIST STRIPPING TECHNIQUE
摘要 A method for fabricating an integrated circuit device is disclosed. The method may include providing a substrate; forming a first material layer over the substrate; forming a patterned second material layer over the substrate; and removing the patterned second material layer with a fluid comprising a steric hindered organic base and organic solvent.
申请公布号 US2011076624(A1) 申请公布日期 2011.03.31
申请号 US20090566762 申请日期 2009.09.25
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 WANG CHIEN-WEI;CHANG CHING-YU
分类号 G03F7/20;G03F7/42 主分类号 G03F7/20
代理机构 代理人
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