| 摘要 |
PROBLEM TO BE SOLVED: To provide a connecting structure for a vacuum seal, performing vacuum seal, electric insulation and distance fixing between parts forming a vacuum device at the same time and improving the assemblability and manufacturing cost as compared with conventional examples. SOLUTION: The connecting structure 100B for the vacuum seal includes the electrical conductive parts 20, 21 forming the vacuum device and an insulative seal member 10 integrally formed with an annular seal portion 12 securing airtightness between the parts 20, 21 and an annular spacer portion 11 fixing a distance between the parts 20, 21. A first annular groove 13 is formed in a main face of the seal member 10 between the seal portion 12 and the spacer portion 11. A second groove 14 communicating with the first groove 13 is formed in the main face to penetrate the spacer portion 11 in the width direction of the spacer portion 11. COPYRIGHT: (C)2011,JPO&INPIT |
