| 摘要 |
PROBLEM TO BE SOLVED: To efficiently produce a mold core which is used in the molding of a three-dimensionally shaped article having a minute region when the article is molded. SOLUTION: A light shielding mask 2 of a shape corresponding to the plane projection shape of the three-dimensionally shaped article is formed on a light transmittable substrate 1, and a resist layer 4 which covers the light shielding mask 2 is formed on one side of the substrate 1. The resist layer 4 is processed in a three-dimensional shape having a body 4a and a plate part 4b by exposing and developing the resist layer 4 by using a gray scale mask. A resist matrix in a three-dimensional shape having the main boy and the plate part is produced by removing the plate part 4b of the resist layer 4 excluding the vicinity of the body 4a by developing the resist layer 4 by carrying out exposure to the resist layer 4 through the substrate 1. With the use of the resist matrix, an electroformed stamper having a three-dimensionally shaped recess with the three-dimensional shape of the resist matrix inverted is produced. By cutting the pattern surface of the electroformed stamper, a part corresponding to the plate part of the resist matrix is removed. COPYRIGHT: (C)2011,JPO&INPIT
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