发明名称 CURABLE COMPOSITION FOR PHOTO-IMPRINT, AND METHOD FOR PRODUCING CURED MATERIAL USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a new curable composition for imprint excelling in an imprint property, substrate adhesion, temporal stability and photo-curability. SOLUTION: This curable composition for photo-imprint comprising (A) a photo-polymerizable monomer, (B) a polymerization initiator and (C) a compound represented by formula (1), wherein the content of compounds having a molecular weight of at least 1,000 is≤10 wt.% based on all the solid content therein, and the content of the compound represented by formula (1) of the (C) is 0.3-10.0 wt.% based on all the solid content. In formula (1), Z is an aliphatic hydrocarbon group; R<SP>1</SP>and R<SP>2</SP>are each independently a hydrogen atom or substituted group; R<SP>3</SP>and R<SP>4</SP>are each independently a methyl group, ethyl group, methoxy group or ethoxy group; and R<SP>5</SP>is a methoxy group or ethoxy group. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011066370(A) 申请公布日期 2011.03.31
申请号 JP20090233517 申请日期 2009.10.07
申请人 FUJIFILM CORP 发明人 YONEZAWA HIROYUKI;FUJITA AKINORI;TAKAYANAGI TAKASHI
分类号 H01L21/027;C08F2/44;C08F2/48;C08F290/06 主分类号 H01L21/027
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