| 摘要 |
PROBLEM TO BE SOLVED: To give identification information for surely managing the type, the history and the like of a pattern forming template to the template without damaging a main pattern of the template and by ensuring a sufficient space for more detailed management. SOLUTION: The template with an identification mark used in an optical imprinting method has a main pattern region 12 wherein a desired pattern is formed in an irregular form on a front surface of a light transmissive substrate 11 and includes the pattern forming template 10 used for optical imprinting, and the identification mark 15 formed on a rear surface of the substrate 11 to partially overlap the main pattern region 12 for individual identification of each template. COPYRIGHT: (C)2011,JPO&INPIT
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