发明名称 FABRICATION METHOD OF PHASE CHANGE RANDOM ACCESS MEMORY DEVICE
摘要 A method of fabricating a phase change random access memory device includes forming a sacrificial layer of a predetermined height within a bottom electrode contact hole. The method also includes forming an insulating layer on a whole resultant structure including the bottom electrode contact hole. The method also includes forming a spacer on a sidewall of the bottom electrode contact hole by etching the insulating layer and removing the sacrificial layer.
申请公布号 US2011076824(A1) 申请公布日期 2011.03.31
申请号 US20100839458 申请日期 2010.07.20
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHOI KANG SIK;KIM SUNG CHEOUL
分类号 H01L21/02 主分类号 H01L21/02
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