RF GENERATOR FREQUENCY COMMON-MODE NOISE FILTER TREATMENT

摘要

PURPOSE: An RF generator frequency common-mode noise filter treatment is provided to remove the high frequency component which occurs according to the condition during use of electrode. CONSTITUTION: A generation frequency supplied to an oscillator is amplified in alternating current output by an amplifier(12) and is supplied to an electrode. A common mode noise filter(11) is arranged between the amplifier and the electrode. The harmonic component generated from the electrode is removed according to the operation condition.