| 摘要 |
1,211,618. Electron and ion beam apparatus. GENERAL ELECTRIC CO. 20 Aug., 1968 [28 Sept., 1967], No. 17017/69. Addition to 1,211,616. Heading HID. The subject-matter of this Specification is identical with that described in the parent Specification, but the claims are concerned with the combination of the "course" scanning deflection system for deflecting the beam over the lens array, the lens array and the "fine" deflection system for deflecting the charged particles emerging from the lens array over the target.
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