发明名称 TRANSFERRING TOOL FOR DEVICE
摘要 PURPOSE: A transferring tool for a device is provided to improve production yield by stably loading s small size device. CONSTITUTION: In a transferring tool for a device, a picker(850) absorbs a device and places it on a loading position. A support block(820) supports the picker. An X guide rail guides the support block in X-direction. A Z guide rail(812) guides the support block in Z-direction. A rotary arm moves the support block to X-direction and Z-direction to reciprocate the picker between a withdrawing position and the loading position. An X-guide rail, a Z-guide rail, and the rotary shaft are installed in a support unit.
申请公布号 KR20110032667(A) 申请公布日期 2011.03.30
申请号 KR20090090276 申请日期 2009.09.23
申请人 JT CORPORATION 发明人 YOU, HONG JUN;LEE, YONG SIK
分类号 G01R31/26;H01L21/66;H01L21/67 主分类号 G01R31/26
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