发明名称 |
TRANSFERRING TOOL FOR DEVICE |
摘要 |
PURPOSE: A transferring tool for a device is provided to improve production yield by stably loading s small size device. CONSTITUTION: In a transferring tool for a device, a picker(850) absorbs a device and places it on a loading position. A support block(820) supports the picker. An X guide rail guides the support block in X-direction. A Z guide rail(812) guides the support block in Z-direction. A rotary arm moves the support block to X-direction and Z-direction to reciprocate the picker between a withdrawing position and the loading position. An X-guide rail, a Z-guide rail, and the rotary shaft are installed in a support unit. |
申请公布号 |
KR20110032667(A) |
申请公布日期 |
2011.03.30 |
申请号 |
KR20090090276 |
申请日期 |
2009.09.23 |
申请人 |
JT CORPORATION |
发明人 |
YOU, HONG JUN;LEE, YONG SIK |
分类号 |
G01R31/26;H01L21/66;H01L21/67 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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