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发明名称
Scanning transmission electron microscope using gas amplification
摘要
申请公布号
EP2182546(A3)
申请公布日期
2011.03.30
申请号
EP20090174824
申请日期
2009.11.03
申请人
FEI COMPANY
发明人
KNOWLES, WILLIAM;TOTH, MILOS
分类号
H01J37/244;H01J37/28
主分类号
H01J37/244
代理机构
代理人
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地址
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