A DEVICE AND METHOD FOR FINELY ADJUSTING HEIGHT OF COATING REGION STAGE OF A SUBSTRATE FLOATING UNIT, AND A SUBSTRATE FLOATING UNIT AND A COATING APPARATUS HAVING THE SAME

摘要

PURPOSE: An apparatus for adjusting detail height of coating area stage of a substrate floating unit is provided to improve uniformity and to minimize spot occurrence. CONSTITUTION: An apparatus for adjusting detail height of coating area stage comprises: a detail height controlling member having a plurality of plates at the lower part; a measuring device for continuously measuring the coating height; and a controller which is connected to the plural height controlling members and measuring device and controls operation of the plural height controlling members. The plural height controlling member is operated by piezo actuator.