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发明名称
SPUTTERING APPARATUS AND SPUTTERING METHOD
摘要
申请公布号
KR20110033184(A)
申请公布日期
2011.03.30
申请号
KR20117000341
申请日期
2009.06.23
申请人
ULVAC, INC.
发明人
MORIMOTO NAOKI;KONDO TOMOYASU;KAMADA KOKICHI;NAKAMURA KYUZO
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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