Method for controlling ion energy in radio frequency plasmas
摘要
<p>A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.</p>
申请公布号
EP2122657(B1)
申请公布日期
2011.03.30
申请号
EP20080786101
申请日期
2008.07.11
申请人
RUHR-UNIVERSITAET BOCHUM
发明人
HEIL, BRIAN, GEORGE;CZARNETZKI, UWE;BRINKMANN, RALF, PETER;MUSSENBROCK, THOMAS