发明名称 Integrated visible pilot beam for non-visible optical waveguide devices
摘要 In one embodiment, a radiation based analysis system comprises a first radiation source to generate first radiation having a wavelength outside the visible spectrum, a second radiation source to generate second radiation having a wavelength within the visible spectrum, and a waveguide coupler to couple a portion of the first radiation and a portion of the second radiation into a combined radiation beam such that the first radiation and the second radiation follow a path that is substantially coaxial.
申请公布号 US7916985(B2) 申请公布日期 2011.03.29
申请号 US20070844797 申请日期 2007.08.24
申请人 KLA-TENCOR CORPORATION 发明人 PEALE DAVID R.
分类号 G02B6/32;G02B6/26 主分类号 G02B6/32
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