发明名称 Asymmetric field effect transistor structure and method
摘要 Disclosed are embodiments of an asymmetric field effect transistor structure and a method of forming the structure in which both series resistance in the source region (Rs) and gate to drain capacitance (Cgd) are reduced in order to provide optimal performance (i.e., to provide improved drive current with minimal circuit delay). Specifically, different heights of the source and drain regions and/or different distances between the source and drain regions and the gate are tailored to minimize series resistance in the source region (i.e., in order to ensure that series resistance is less than a predetermined resistance value) and in order to simultaneously to minimize gate to drain capacitance (i.e., in order to simultaneously ensure that gate to drain capacitance is less than a predetermined capacitance value).
申请公布号 US7915670(B2) 申请公布日期 2011.03.29
申请号 US20070778185 申请日期 2007.07.16
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ANDERSON BRENT A.;BRYANT ANDRES;CLARK, JR. WILLIAM F.;NOWAK EDWARD J.
分类号 H01L29/78;H01L21/336;H01L29/76 主分类号 H01L29/78
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