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发明名称
DISCHARGING METHOD OF SEMICONDUCTOR CHIP AND ITS DEVICE
摘要
申请公布号
KR101023935(B1)
申请公布日期
2011.03.29
申请号
KR20090021640
申请日期
2009.03.13
申请人
发明人
分类号
H01L21/68;H01L21/66;H01L21/683;H01L21/687
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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