发明名称 Methods for forming small contacts
摘要 Methods are provided for forming contacts for a semiconductor device. The methods may include depositing various materials, such as polysilicon, nitride, oxide, and/or carbon materials, over the semiconductor device. The methods may also include forming a contact hole and filling the contact hole to form the contact for the semiconductor device.
申请公布号 US7915160(B1) 申请公布日期 2011.03.29
申请号 US20070625190 申请日期 2007.01.19
申请人 GLOBALFOUNDRIES INC. 发明人 TABERY CYRUS E.;DAKSHINA-MURTHY SRIKANTESWARA;YANG CHIH-YUH;YU BIN
分类号 H01L21/4763;H01L21/302 主分类号 H01L21/4763
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