发明名称 |
Supporting device for heating crucible and deposition apparatus having the same |
摘要 |
A device for supporting a heating crucible includes a supporting table having an upper surface in which a plurality of holes are formed, and a contamination prevention plate arranged at an entrance of each of the holes of the supporting table and having an opening portion corresponding to the hole and a shield portion extending along an inner wall of the hole.
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申请公布号 |
US7914620(B2) |
申请公布日期 |
2011.03.29 |
申请号 |
US20060335740 |
申请日期 |
2006.01.20 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
CHI CHANG-SOON |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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