| 摘要 |
<p>PURPOSE: A substrate transferring method and a substrate processing method are provided to improve the efficiency of a substrate transfer supplied to an in-line by automatically stopping the supply of the following substrate for the difference between actual process time and reference process time. CONSTITUTION: Reference process time is set to process a substrate in a process chamber(S110). The actual process time of a first substrate is measured in the process chamber(S120). The actual process time is compared with the reference process time(S130). If the actual process time is longer than the reference process time, substrate input time for supplying a second substrate following the first substrate to the process chamber is controlled(S140).</p> |
