发明名称 Semiconductor device with fin and silicide structure
摘要 A semiconductor device according to an embodiment includes: a semiconductor substrate; a fin formed on the semiconductor substrate; a gate electrode formed so as to sandwich both side faces of the fin between its opposite portions via a gate insulating film; an extension layer formed on a region of a side face of the fin, the region being on the both sides of the gate electrode, the extension layer having a plane faced to a surface of the semiconductor substrate at an acute angle; and a silicide layer formed on a surface of the plane faced to the surface of the semiconductor substrate at an acute angle.
申请公布号 US7915693(B2) 申请公布日期 2011.03.29
申请号 US20080179995 申请日期 2008.07.25
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 OKANO KIMITOSHI
分类号 H01L27/088 主分类号 H01L27/088
代理机构 代理人
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