发明名称 IMAGE SENSOR AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: An image sensor and a manufacturing method thereof are provided to improve light sensitivity by shortening a focal distance between a micro lens and a photo diode. CONSTITUTION: A semiconductor substrate includes a pixel area with a unit pixel(20) and a peripheral circuit area. A lower insulation layer includes a lower wiring formed on the semiconductor substrate to be connected to the pixel area and the peripheral circuit area. An upper insulation layer includes an upper wiring to be connected to the lower wiring of the peripheral circuit area on the lower insulation layer. A first trench is formed on the upper insulation layer of the pixel area. A second trench is formed on the lower insulation layer under the first trench. A color filter(60) is formed in a second trench. A micro lens(72) is formed in the first trench to correspond to the color filter.
申请公布号 KR20110031582(A) 申请公布日期 2011.03.29
申请号 KR20090088898 申请日期 2009.09.21
申请人 DONGBU HITEK CO., LTD. 发明人 PARK, JIN HO
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项
地址