发明名称 Cleaning apparatus and cleaning method
摘要 A cleaning apparatus which can efficiently and satisfactorily clean component parts facing narrow spaces. A mixture of a substance in gaseous form and the same substance in liquid form or solid form as the former is jetted out from a jet pipe toward deposits attached to a structural object. The jetted mixture and the deposits to which the mixture has been jetted are sucked into a suction pipe.
申请公布号 US7913351(B2) 申请公布日期 2011.03.29
申请号 US20070844748 申请日期 2007.08.24
申请人 TOKYO ELECTRON LIMITED 发明人 MORIYA TSUYOSHI
分类号 A47L7/00 主分类号 A47L7/00
代理机构 代理人
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