发明名称 |
Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same |
摘要 |
An air filtering device and an air cleaning system of a semiconductor manufacturing apparatus to reduce cost and increase manufacturing productivity. The air filtering device may include a frame having an open aperture coupled to an air supply line. A buffer frame configured to be inserted into the frame may include a plurality of slot parts, each slot part having a plurality of air in/out apertures through which air may flow in or out from the buffer frame. A plurality of filters may be releasably fastened to the plurality of slot parts to filter pollution material contained in air flowing through the air in/out apertures. An air interrupter for interrupting air flowing through the air in/out apertures may be used when replacing the plurality of filters, thereby providing purified air to the semiconductor manufacturing apparatus during the replacement.
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申请公布号 |
US7914594(B2) |
申请公布日期 |
2011.03.29 |
申请号 |
US20080180289 |
申请日期 |
2008.07.25 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHO CHANG-MIN;KIM JOO-YOUNG;KIM JI-YOUNG;RYU JU-A;AHN YO-HAN;CHOI HYUNG-SEOK;HAM DONG-SEOK |
分类号 |
B01D46/00 |
主分类号 |
B01D46/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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