| 摘要 |
A method of calibrating a high energy beam with a material source, the method comprising the steps of: using the high energy beam to provide an aperture, depositing material from the material source towards the aperture for a selected length of time and collecting the material which passes through the aperture, and adjusting the position and/or alignment of the material source relative to the high energy beam dependant on a comparison of the amount of material collected with a predetermined value.
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