发明名称 Methods of forming integrated circuit devices
摘要 The invention includes methods of forming semiconductor constructions and methods of forming pluralities of capacitor devices. An exemplary method of the invention includes forming conductive material within openings in an insulative material to form capacitor electrode structures. A lattice is formed in physical contact with at least some of the electrode structures, a protective cap is formed over the lattice, and subsequently some of the insulative material is removed to expose outer surfaces of the electrode structures. The lattice can alleviate toppling or other loss of structural integrity of the electrode structures, and the protective cap can protect covered portions of the insulative material from the etch. After the outer sidewalls of the electrode structures are exposed, the protective cap is removed. The electrode structures are then incorporated into capacitor constructions.
申请公布号 US7915136(B2) 申请公布日期 2011.03.29
申请号 US20090512756 申请日期 2009.07.30
申请人 ROUND ROCK RESEARCH, LLC 发明人 MANNING H. MONTGOMERY
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
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