Method of forming an actuating mechanism for a probe storage system

摘要

A method of forming an actuating mechanism for a probe storage system includes providing a scanner chip having a main body including first and second outer surfaces and first and second coil mounting cavities. First and second coils are positioned in respective ones of the first and second coil mounting cavities. First and second magnet receiving pockets are formed in a first plate with first and second magnets being positioned in corresponding ones of the first and second magnet receiving pockets. The first plate is arranged relative to one of the first and second outer surfaces of the scanner chip with the first and second magnets registering with respective ones of the first and second coils. The first plate is spaced from the one of the first and second outer surfaces by a gap of less than about 10 microns.