| 摘要 |
A liquid processing apparatus, includes an apparatus main body, a power room having an atmosphere separated from the clean room by a partition member, an air suction path configured to suction an air in the clean room and take the air into the power room, a temperature control part provided in the power room and configured to control at least a temperature of the air taken in via the air suction path, an air supplying path configured to supply the air from the temperature control part to the liquid processing unit, a ventilation part configured to take the air from the air suction path and supply the air via the air supplying path, and a cleaning filer configured to clean the air taken in from the air suction path.
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