| 摘要 |
FIELD: electricity. ^ SUBSTANCE: plasma source (1) comprises several ionising electrodes (4) and ionising chamber (2) with inlet nozzle (3) for introduction of gas and outlet hole (9) for dosing of ionised gas to the object. Ionising electrodes (4) are located in parallel to each other to form an equilateral polygon in cross section. Ratio of distance (dEe) electrode-electrode, at one side, and distance (dEW) electrode-wall, at the other side, when measured at the end of ionising electrodes (4), is within 1.8-2.2. ^ EFFECT: simplifying discharge initiation and to increase stability of electrodes operation. ^ 17 cl, 9 dwg |
