| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern inspection device capable of enhancing detection sensitivity, and a method for manufacturing a structure having a pattern. SOLUTION: The pattern inspection device is equipped with a detection data forming part for forming detection data on the basis of the optical image of the pattern formed to an object to be inspected, a reference data forming part for forming the reference data related to the pattern, a template matching part having a variable template capable of arbitrarily setting the logic in the pixels constituting the template, and a flaw detection part for comparing the detection data and the reference data to detect a flaw part. COPYRIGHT: (C)2011,JPO&INPIT
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