发明名称 REGENERATIVE RING RESONATOR
摘要 A laser includes a regenerative ring resonator that includes a discharge chamber having electrodes and a gain medium between the electrodes for producing a laser beam; a partially-reflective optical coupler, and a beam modification optical system in the path of the laser beam. The beam modification optical system transversely expands a profile of the laser beam such that the near field laser beam profile uniformly fills each aperture within the laser and such that the regenerative ring resonator remains either conditionally stable or marginally unstable when operating the laser at powers that induce thermal lenses in optical elements inside the regenerative ring resonator.
申请公布号 US2011069733(A1) 申请公布日期 2011.03.24
申请号 US20100724681 申请日期 2010.03.16
申请人 CYMER INC. 发明人 YE HONG;SANDSTROM RICHARD L.;ROKITSKI SLAVA;BROWN DANIEL J.W.;RAFAC ROBERT J.
分类号 H01S3/08 主分类号 H01S3/08
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