发明名称 |
Method for manufacturing microstructure for organic LED (OLED) for e.g. LCD, involves structuring materials deposited on base material to transfer microstructure on base material |
摘要 |
<p>The method involves depositing materials (6) on a base material (7) using intermediate support structure comprising intermediate support layer (2), light reflection layer (3), light absorption layer (4) and protective layer (5) which are sequentially stacked. The deposited materials are finely structured to transfer a microstructure on the base material. An independent claim is included for apparatus for manufacturing microstructure.</p> |
申请公布号 |
DE102009041324(A1) |
申请公布日期 |
2011.03.24 |
申请号 |
DE20091041324 |
申请日期 |
2009.09.15 |
申请人 |
VON ARDENNE ANLAGENTECHNIK GMBH |
发明人 |
GROSS, HARALD |
分类号 |
H01L51/56;B81C1/00;C23C14/12;C23C14/24 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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