发明名称 Method for manufacturing microstructure for organic LED (OLED) for e.g. LCD, involves structuring materials deposited on base material to transfer microstructure on base material
摘要 <p>The method involves depositing materials (6) on a base material (7) using intermediate support structure comprising intermediate support layer (2), light reflection layer (3), light absorption layer (4) and protective layer (5) which are sequentially stacked. The deposited materials are finely structured to transfer a microstructure on the base material. An independent claim is included for apparatus for manufacturing microstructure.</p>
申请公布号 DE102009041324(A1) 申请公布日期 2011.03.24
申请号 DE20091041324 申请日期 2009.09.15
申请人 VON ARDENNE ANLAGENTECHNIK GMBH 发明人 GROSS, HARALD
分类号 H01L51/56;B81C1/00;C23C14/12;C23C14/24 主分类号 H01L51/56
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