| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for pre-drying and a method of pre-drying capable of suppressing the occurrence of unevenness formed on a coating film and shortening tact time required for a drying process. SOLUTION: The apparatus for pre-drying is for pre-drying the coating film before the coating film is dried in the drying apparatus for drying the coating film applied on a substrate. In the apparatus for pre-drying, the coating film on a substrate is pre-dried by exposing the substrate in a high temperature atmosphere using a heated floating gas while transporting the substrate by a floating transporting system. COPYRIGHT: (C)2011,JPO&INPIT |
