| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for detecting and analyzing, or a method for quantitatively determining a vacuum ultraviolet ray by a simple method by utilizing a low-energy electron beam. SOLUTION: A metal fluoride crystal such as LaF<SB>3</SB>doped with Nd is held in a low vacuum atmosphere of about 1-300 Pa, and the metal fluoride crystal is irradiated with an electron beam having low energy of 1-30 kV to emit light including a vacuum ultraviolet ray. Then, emitted light is condensed and spectrally diffracted, and the vacuum ultraviolet ray is detected by using a charge coupled device detector and analyzed, to thereby obtain an emission image or an emission spectrum. Further, when determining intensity of the vacuum ultraviolet ray, determination is performed by using an aluminum nitride crystal as a calibration standard sample. COPYRIGHT: (C)2011,JPO&INPIT
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