| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional measuring device capable of measuring a three-dimensional shape of an object with sufficient accuracy. SOLUTION: The three-dimensional measuring device (100) includes: an imaging optical system (10) for imaging reflected light from the surface of a test sample (T); an imaging part (15) for imaging the surface of the test sample via the imaging optical system; and a three-dimensional calculation part (17) for calculating a three-dimensional shape of the test sample on the basis of a plurality of images acquired by imaging with the imaging part, while relatively changing the focal position of the imaging optical system and the position of the test sample, in the direction of the optical axis of the imaging optical system. The imaging optical system fulfills the relation of f*θ<h<f*tanθ. Here, f is the focal distance of the imaging optical system; h is the distance from the optical axis of the imaging optical system to an arbitrary point of the test sample; andθis an angle which the optical axis of the imaging optical system and a main beam from the imaging optical system to the test sample form. COPYRIGHT: (C)2011,JPO&INPIT
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