| 摘要 |
PROBLEM TO BE SOLVED: To provide a SQUID magnetic detection device having a cooling device, which includes a small-sized SQUID sensor part suitable for inspecting a fine foreign matter intermingled into a magnetically-wide electrode material, a film sheet or the like. SOLUTION: In this SQUID magnetic detection device having the cooling device for detecting a fine foreign matter in a detection object, the SQUID sensor part 2 for detecting a fine foreign matter in the detection object is separated from a coolant tank 1 for supplying a coolant for cooling the SQUID sensor part 2, and the SQUID sensor part 2 and the coolant tank 1 are arranged mutually separately. COPYRIGHT: (C)2011,JPO&INPIT |
