发明名称 APPARATUS AND METHOD FOR EXPOSING EDGE OF SUBSTRATE
摘要 An apparatus and method for exposing an edge of a substrate are disclosed, in which an exposure time period for exposing the edge of the substrate is reduced. The apparatus for exposing an edge of a substrate includes a loading unit loading the substrate, and an edge exposure unit exposing the edge of the substrate loaded by the loading unit using each of a long side exposure unit and a short side exposure unit. Therefore, since the edge of the substrate is exposed using each of the long side exposure unit and the short side exposure unit, it is possible to reduce the edge exposure time period, thereby improving productivity. In addition, since no rotation of the substrate is required, it is possible to reduce the size of the apparatus. Moreover, since the apparatus is provided in an in-line type, it is possible to easily draw the substrate using a conveyer.
申请公布号 US2011069294(A1) 申请公布日期 2011.03.24
申请号 US20100954362 申请日期 2010.11.24
申请人 LG DISPLAY CO., LTD. 发明人 PARK JONG HO
分类号 G03B27/54 主分类号 G03B27/54
代理机构 代理人
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