| 摘要 |
A liquid ejecting head having pressure chambers each communicating with a nozzle opening for liquid ejection and piezoelectric element having a first electrode, a piezoelectric layer consisting a perovskite oxide containing lead, zirconium, and titanium, and a second electrode. The piezoelectric layer has a carbon intensity ratio in the range of 8 to 28 in its inner region excluding the volume 20 nm in depth from the second electrodes. The carbon intensity ratio is defined as the ratio of the maximum carbon intensity to the minimum as measured by secondary ion mass spectrometry along the thickness of the piezoelectric layer.
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