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发明名称
Apparatus for transferring large size substrate for use in transfer chamber at vacuum atmosphere
摘要
申请公布号
KR101023050(B1)
申请公布日期
2011.03.24
申请号
KR20080106958
申请日期
2008.10.30
申请人
发明人
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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