| 摘要 |
PROBLEM TO BE SOLVED: To provide a reduced-pressure dryer capable of restricting uneven drying in a coating film. SOLUTION: This reduced-pressure dryer includes: a chamber part 10 housing a board 1; a board support part 20 supporting the board 1 by abutting on a back surface of the board 1 in the state of housing the board 1 in the chamber part 10; and a control device controlling drive of the board support part 20. The control device changes an abutment position wherein the board support part 20 abuts on the back surface of the board 1 by controlling drive of the board support part 20 in the state that the chamber part 10 is under the vacuum drying environment. COPYRIGHT: (C)2011,JPO&INPIT |
