| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical functional element capable of suppressing the leakage of light generated in a semiconductor element part of the optical functional element and capable of improving the efficiency of extraction of light generated in a light-emitting element part, and to provide an optical functional element string, an exposure apparatus and a method for manufacturing the optical functional element. SOLUTION: The optical functional element includes: a substrate 1; a semiconductor element part 6 formed on a first portion of a semiconductor element multilayer structure, which is separated by a groove 5 formed in a direction crossing the multilayer surface of the semiconductor element multilayer structure, wherein the semiconductor element multilayer structure includes a semiconductor element structure 2 formed by laminating p-type semiconductor layers and n-type semiconductor elements on the substrate 1 in the order of npn or pnp and a light reflection layer 3 formed by alternately laminating semiconductor layers having respectively different refractive indexes on opposite side to the substrate 1 side of the semiconductor element structure 2; and a light-emitting element part 7 formed by laminating a light-emitting element structure 4 on the light reflection layer 3 of a second portion of the semiconductor element multilayer structure, which is separated by the groove 5. COPYRIGHT: (C)2011,JPO&INPIT
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