| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electroplating equipment and an electroplating method, capable of adjusting dissolved oxygen concentration in a plating liquid and reducing cost due to filter exchange. <P>SOLUTION: The electroplating equipment 11 comprises: a plating tank 13 for holding the plating solution; and a separate tank 15 apart from the plating tank 13, wherein the plating solution circulates between the plating tank 13 and the separate tank 15. The separate tank 15 contains a first space 17 and a second space 19 located downstream from the first space 17. The plating solution in the first space 17 exceeding a prescribed height flows from the first space 17 into the second space 19, and the plating solution falls through air in the second space 19. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
