| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device which relaxes positional precision of a hand part when a substrate is sucked and held with a Bernoulli chuck, for efficient transfer of a substrate in non-contact state at a high speed. SOLUTION: The hand part of parallel mechanism is provided with a Bernoulli chuck which sucks and holds a substrate in non-contact state, and a plurality of regulation pins arranged in such manner as surround the Bernoulli chuck. An introducing axis part, being tapered to decrease diameter as advances downward, is provided to the lower end of the regulation pin formed in round rod. A regulating axis part which receives the periphery of substrate to regulate skidding is provided to the middle part in vertical direction of the regulation pin including the introducing axis part. The introducing axis part can also work as the regulating axis part. COPYRIGHT: (C)2011,JPO&INPIT |
