| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a silicon carbide member having the surface of high degree of smoothness. SOLUTION: The method for producing the silicon carbide member comprises the steps of: subjecting theβ-type silicon carbide member to surface treatment; and heat-treating theβ-type silicon carbide member subjected to surface treatment at 1,400-1,900°C in an atmosphere containing Si to promote the grain growth of silicon carbide on the surface of theβ-type silicon carbide member. COPYRIGHT: (C)2011,JPO&INPIT |
