发明名称 |
METHODS AND STRUCTURES FOR ENHANCING PERIMETER-TO-SURFACE AREA HOMOGENEITY |
摘要 |
Methods and structures for enhancing the homogeneity in a ratio of perimeter to surface area among heterogeneous features in different substrate regions. At least one shape on the substrate includes an added edge effective to reduce a difference in the perimeter-to-surface area ratio between the features in a first substrate region and features in a second substrate region. The improved homogeneity in the perimeter-to-surface area ratio reduces variations in a thickness of a conformal layer deposited across the features in the first and second substrate regions.
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申请公布号 |
US2011068436(A1) |
申请公布日期 |
2011.03.24 |
申请号 |
US20090566043 |
申请日期 |
2009.09.24 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CULP JAMES A.;ELLIS-MONAGHAN JOHN J.;GAMBINO JEFFREY P.;PETERSON KIRK D.;RANKIN JED H. |
分类号 |
H01L21/311;H01L21/3213;H01L23/544 |
主分类号 |
H01L21/311 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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