| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for controlling an XY table allowing high-accuracy and easy positioning of a set table. SOLUTION: The method for controlling the XY table includes: an actual coordinate obtaining process of moving each point in a virtual matrix as a target coordinate point, and obtaining actual coordinate data having each actual movement coordinate point of the set table 2; and a coordinate correction process of correcting the target coordinate point in a movement instruction to an X-axis movement mechanism 3 and a Y-axis movement mechanism 5 based on the obtained actual coordinate data. COPYRIGHT: (C)2011,JPO&INPIT |
