| 摘要 |
An electrical network and method of manufacturing thereof. A substrate containing an acoustic resonator enclosed in a cavity. An apparatus includes a substrate with a cavity and a network. The network has a resonator formed on a substrate, the resonator being enclosed within the resonator cavity. A capacitive device is formed on the same substrate and connected in series with the resonator. The capacitive device has a conductive film and a solid-dielectric film. The conductive film has high absorption to a select laser wavelength. The network has at least two open-ended electrical contacts on the substrate for an off-substrate electrical connection.
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