| 摘要 |
Disclosed is a pattern forming method having a first step of forming a first ultraviolet curable resin layer on a substrate, a second step of leading a pattern-formed surface of a first mold wherein a predetermined pattern is formed to oppose the first ultraviolet curable resin layer, and attaching the substrate to the first mold by applying pressure, and a third step of irradiating diffused ultraviolet rays on the first ultraviolet curable resin layer, to which the pattern of the first mold is transferred by the pressure-attaching, the irradiated ultraviolet rays being diffused by disposing an ultraviolet light diffusion member between the ultraviolet curable resin layer and an ultraviolet light source.
|
