发明名称 |
PHOTOCURABLE TRANSFER SHEET, AND METHOD FOR FORMING RECESSED AND PROJECTED PATTERN USING SAME |
摘要 |
<p>Disclosed is a photocurable transfer sheet which can be advantageously used for the production of an intermediate stamper that is used in a nanoimprinting process. The photocurable transfer sheet exhibits excellent releasability from a mold, which is used for the production of the intermediate stamper and has a fine recessed and projected pattern, and also exhibits excellent releasability from a photocurable resin to which a recessed and projected pattern is transferred from the intermediate stamper. In addition, the photocurable transfer sheet exhibits excellent transferability of a recessed and projected pattern. Also disclosed is a method for forming a fine recessed and projected pattern using the photocurable transfer sheet. Specifically disclosed is a photocurable transfer sheet (10) which comprises a photocurable transfer layer (11) that can be deformed by the application of a pressure and is composed of a photocurable composition that contains a polymer and a reactive diluent agent. The photocurable transfer sheet (10) is characterized in that the polymer is composed of an acrylic resin that contains a (meth)acrylate repeating unit having an alicyclic group. Also specifically disclosed is a method for forming a recessed and projected pattern using the photocurable transfer sheet (10).</p> |
申请公布号 |
WO2011034123(A1) |
申请公布日期 |
2011.03.24 |
申请号 |
WO2010JP66020 |
申请日期 |
2010.09.16 |
申请人 |
BRIDGESTONE CORPORATION;INAMIYA TAKATO;HASHIMOTO MASASHI;KAIDA EIZOU |
发明人 |
INAMIYA TAKATO;HASHIMOTO MASASHI;KAIDA EIZOU |
分类号 |
H01L21/027;B29C33/38;B29C59/02;B29K33/04;B32B3/26;B32B3/30;B32B27/30 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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