| 摘要 |
PURPOSE: A motion stage is provided to reduce maintenance and repair costs by decreasing the probability of a contact failure or cable cut due to the motion of a motor. CONSTITUTION: A plurality of motors(Z1-Z3) include a fixing unit and a moving unit. A plurality of drivers(120) are adjacent to the plurality of motors and control the corresponding motor. The plurality of drivers are electrically connected with a daisy chain or multi drop method. The plurality of drivers are controlled using a power line communication method. The part of the motors are attached to the moving unit of the corresponding motor.
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