发明名称 Embedded SRAM Memory for Low Power Applications
摘要 Circuits and methods for providing a dual gate oxide (DGO) embedded SRAM with additional logic portions, where the logic and the embedded SRAM have NMOS transistors having a common gate dielectric thickness but have different lightly doped drain (LDD) implantations formed using different LDD masks to provide optimum transistor operation. In an embodiment, a first embedded SRAM is a single port device and a second embedded SRAM is a dual port device having a separate read port. In certain embodiments, the second SRAM includes NMOS transistors having LDD implants formed using the logic portion LDD mask. Transistors formed with the logic portion LDD mask are faster and have lower Vt than transistors formed using a SRAM LDD mask. Dual core devices having multiple embedded SRAM arrays are disclosed. Methods for making the embedded SRAM are also disclosed.
申请公布号 US2011068413(A1) 申请公布日期 2011.03.24
申请号 US20100829084 申请日期 2010.07.01
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LIAW JHON-JHY
分类号 H01L27/088;H01L21/8239 主分类号 H01L27/088
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